Single photon counting Geiger mode InGaAs(P)/InP avalanche photodiode arrays for 3D imaging

Rengarajan Sudharsanan; Ping Yuan; Joseph Boisvert; Paul McDonald; Takahiro Isshiki; Shoghig Mesropian; Ed Labios; Michael Salisbury

doi:10.1117/12.778278

16 April 2008 Single photon counting Geiger mode InGaAs(P)/InP avalanche photodiode arrays for 3D imaging

Rengarajan Sudharsanan, Ping Yuan, Joseph Boisvert, Paul McDonald, Takahiro Isshiki, Shoghig Mesropian, Ed Labios, Michael Salisbury

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Proceedings Volume 6950, Laser Radar Technology and Applications XIII; 69500N (2008) https://doi.org/10.1117/12.778278
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

We have designed, fabricated and characterized InGaAs/InP Geiger-mode avalanche photodiode (APD) 32 x 32 arrays optimized for operation at both 1.06 and 1.55 μm wavelengths Single element devices with a thick multiplication layer thickness showed dark count rate as low as 60 kHz at a 3 V overbias, while photon detection efficiencies at a wavelength of 1.55 μm exceed 30% at 2 V overbias. Back illuminated 32 x 32 detector arrays exhibited breakdown uniformity of greater than 97% and excellent dark current uniformity. Detector arrays were integrated with low-noise read-out integrated circuits for an imaging demonstration. 3D imaging was demonstrated using 1.06 micron detector arrays.

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Rengarajan Sudharsanan, Ping Yuan, Joseph Boisvert, Paul McDonald, Takahiro Isshiki, Shoghig Mesropian, Ed Labios, and Michael Salisbury "Single photon counting Geiger mode InGaAs(P)/InP avalanche photodiode arrays for 3D imaging", Proc. SPIE 6950, Laser Radar Technology and Applications XIII, 69500N (16 April 2008); https://doi.org/10.1117/12.778278

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