Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 6959, including the Title Page, Copyright information, Table of Contents, Introduction, and the Conference Committee listing.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 6959", Proc. SPIE 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, 695901 (2 May 2008); https://doi.org/10.1117/12.798094
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KEYWORDS
Microelectromechanical systems

Space operations

Aerospace engineering

Nanotechnology

Defense and security

Nanolithography

Sensors

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