Micro- and nano-robotic technologies

Toshio Fukuda; Masahiro Nakajima; Pou Liu

doi:10.1117/12.793422

22 April 2008 Micro- and nano-robotic technologies

Toshio Fukuda, Masahiro Nakajima, Pou Liu

Proceedings Volume 6979, Independent Component Analyses, Wavelets, Unsupervised Nano-Biomimetic Sensors, and Neural Networks VI; 69790U (2008) https://doi.org/10.1117/12.793422
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

Today robotic technology can be developed and advanced a lot from industrial robotic manipulation to the micro and nano manipulations. We have been proposed "Nano Laboratory" consisted of the capabilities of nanofabrication, nanoinstrumentaion and nanoassembly to make three dimensional structure, devices and systems in the nanoworld. First the nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope (SEM) and a transmission electron microscope (TEM). Then some precursors are introduced into the working small space in the nanoworld, so that the cutting, bending and fixing operation in the nanoworld will be realized using nanomanipulator, electron-bean-induced deposition (EBID) and other methodologies as in the macro world. After making the three dimensional structure, nano devices such as sensor and actuator can be fabricated.

Citation Download Citation

Toshio Fukuda, Masahiro Nakajima, and Pou Liu "Micro- and nano-robotic technologies", Proc. SPIE 6979, Independent Component Analyses, Wavelets, Unsupervised Nano-Biomimetic Sensors, and Neural Networks VI, 69790U (22 April 2008); https://doi.org/10.1117/12.793422

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