Structural investigation and barrier properties of a-C:H thin films on polymer by PECVD

Yuefei Zhang; Xinchao Bian; Qiang Chen; Yu Wang; Guangqiu Zhang; Yuanjing Ge

doi:10.1117/12.792285

11 March 2008 Structural investigation and barrier properties of a-C:H thin films on polymer by PECVD

Yuefei Zhang, Xinchao Bian, Qiang Chen, Yu Wang, Guangqiu Zhang, Yuanjing Ge

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69840P (2008) https://doi.org/10.1117/12.792285
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

In this paper, a thin amorphous hydrogenated carbon films were deposited on polyethylene terephthalate (PET) by means of capacitive coupled RF plasma-enhanced chemical vapor deposition (PECVD) using a mixture of CH₄ with Ar gas as a source. The chemical composition of the deposited films were analyzed by fourier transform infrared (FTIR) spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), laser Roman spectroscopy(LRS). And the microgram of the film was detected atomic force microscopy (AFM). The barrier properties were examined by water vapour permeation. The results show that the barrier performance of water vapor permeation in PET coated by hydrogenated carbon film was decreased from 86.16 (g/m²d) to 10.68 (g/m²d) in experiments.

Citation Download Citation

Yuefei Zhang, Xinchao Bian, Qiang Chen, Yu Wang, Guangqiu Zhang, and Yuanjing Ge "Structural investigation and barrier properties of a-C:H thin films on polymer by PECVD", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840P (11 March 2008); https://doi.org/10.1117/12.792285

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