11 March 2008 Properties of compositionally graded (Pb,Sr)TiO3 thin films for tunable microwave device application
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Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69841B (2008) https://doi.org/10.1117/12.792402
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China
Abstract
Multilayered (Pb1-xSrx)TiO3 thin films consisted of uniform PST(x) and sandwich-like compositionally graded PST80- 60-80 were fabricated on Pt/Ti/SiO2/Si substrates by coating the solutions with different Sr contents(60≤Sr(mol%)≤80), respectively. Their structural and dielectric properties were investigated. Both uniform and compositionally graded films crystallized into a perovskite structure with no second phase found after post-deposition annealing. Among uniform films, the PST60 films showed the highest dielectric constant and tunability, but low figure of merit(FOM) due to relatively higher dielectric loss. For the sake of bringing down the dielectric loss, the PST60 thin films were sandwiched by PST80 thin layer, resulting in a decrease in dielectric loss and slight decrease in tunability. Besides the improvement of FOM, the temperature stability of graded PST80-60-80 thin films was also enhanced.
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Dongyi Zhou, Dongyi Zhou, Wenbiao Wu, Wenbiao Wu, Dengren Jin, Dengren Jin, Jinrong Cheng, Jinrong Cheng, Zhongyan Meng, Zhongyan Meng, } "Properties of compositionally graded (Pb,Sr)TiO3 thin films for tunable microwave device application", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841B (11 March 2008); doi: 10.1117/12.792402; https://doi.org/10.1117/12.792402
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