Effects of high magnetic field on the properties of hot-filament CVD diamond films

Jian Huang; Hongyan Peng; Run Xu; Jinyong Xu; Jianmin Liu; Linjun Wang; Yiben Xia

doi:10.1117/12.792770

11 March 2008 Effects of high magnetic field on the properties of hot-filament CVD diamond films

Jian Huang, Hongyan Peng, Run Xu, Jinyong Xu, Jianmin Liu, Linjun Wang, Yiben Xia

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69841U (2008) https://doi.org/10.1117/12.792770
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

A hot filament chemical vapor deposition (HFCVD) apparatus, combined with a cyro-cooled superconductor magnet, were recently developed. Nanocrystalline diamond (NCD) films were prepared by above HFCVD apparatus either with or without high magnetic field. Surface morphologies of these films were characterized by means of atomic force microscope (AFM). The results indicated that the mean surface roughness and grain size of these films decreased when the magnetic field varied from 0T to 4T. From Raman scattering measurement, all films prepared either with or without high magnetic field exhibit NCD features. These NCD features of the sample prepared with 4T magnetic field was obviously pronounced. The structure of these films was also investigated by X-ray diffraction (XRD).

Citation Download Citation

Jian Huang, Hongyan Peng, Run Xu, Jinyong Xu, Jianmin Liu, Linjun Wang, and Yiben Xia "Effects of high magnetic field on the properties of hot-filament CVD diamond films", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841U (11 March 2008); https://doi.org/10.1117/12.792770

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