Surface properties and field emission of BN and BCN films

Takashi Sugino; Chiharu Kimura; Hidemitsu Aoki

doi:10.1117/12.792391

11 March 2008 Surface properties and field emission of BN and BCN films

Takashi Sugino, Chiharu Kimura, Hidemitsu Aoki

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698434 (2008) https://doi.org/10.1117/12.792391
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Synthesis of boron nitride (BN) and boron carbon nitride (BCN) films is carried out by plasma-assisted chemical vapor deposition. The electron affinity of the BN and BCN films is estimated from the threshold energy of the photoelectron yield and the bandgap energy. The negative electron affinity appears on the BN surface, while the positive electron affinity increases on the BCN surface with increasing C composition ratio. It is found that a reduction in the electron affinity occurs due to N₂ plasma treatment rather than H₂ plasma treatment for the BCN film. Field emission characteristics of the BN and BCN nanofilms are investigated. The turn-on electric field of the electron emission does not increase in the region of the C composition ratio lower than 20 %. This is due to the effects of increasing electron affinity and decreasing conduction band discontinuity between the BCN nanofilm and Si substrate. It is demonstrated that field emission characteristics of the graphite nanofiber are improved significantly by coating with BN nanofilm.

Citation Download Citation

Takashi Sugino, Chiharu Kimura, and Hidemitsu Aoki "Surface properties and field emission of BN and BCN films", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698434 (11 March 2008); https://doi.org/10.1117/12.792391

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available