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24 January 2008 Modeling of metal nanoclusters formation, growth, and deposition on a surface under pulsed laser ablation in vacuum
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Proceedings Volume 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies; 69850L (2008) https://doi.org/10.1117/12.787112
Event: Fundamentals of Laser Assisted Micro- and Nanotechnologies, 2007, St. Petersburg, Russian Federation
Abstract
Processes of metal nanoclusters formation under pulsed laser ablation (PLA) of a flat target in vacuum and deposition of ablation products on a flat surface have been studied. The general PLA model consists of three parts: a model which describes absorption of laser radiation and evaporation of the target, a model for description of vapor dynamics and processes of clusters formation and a model of atoms and clusters deposition on the substrate. A heat model based on unsteady one-dimensional heat conduction equation with volumetric heat source has been used to describe laser radiation absorption and heating of the target. An analogous heat model has been used to describe heating of the substrate. The direct simulation Monte-Carlo method has been used to describe vapor expansion and formation of clusters. The process of ablation products (atoms and clusters) transport from the target to the substrate under conditions typical for production of thin films (nanosecond pulses, moderate radiation intensities) has been considered on the example of laser ablation of niobium. Performed numerical investigations allow to establish general correlations between parameters of vapor flow (including clusters parameters) and deposited film properties.
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German A. Lukyanov, Nikolay Yu. Bykov, and Lidia Yu. Nikolaeva "Modeling of metal nanoclusters formation, growth, and deposition on a surface under pulsed laser ablation in vacuum", Proc. SPIE 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies, 69850L (24 January 2008); https://doi.org/10.1117/12.787112
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