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21 April 2008 Quick and non-invasive method for characterisation of profiles of nano-photonics structures
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Abstract
Depth and profile information of one or two-dimensional photonic crystals can be obtained through measurements of reflective diffractive patters obtained from the structures and subsequent numerical analysis. The technique is known as a scatterometry. The method is non-invasive and fast, and competitive to the alternatives of AFM, SEM etc. In our paper we presented results of investigation 1D photonic crystal fabricated in GaN with period Λ = 400 nm, fill factor ff = 50% and depth d = 400 nm. Using computer algorithm of Rigorous Coupled Wave Analysis (RCWA) and measuring diffracted light we extracted the profile parameters of Λ = 420 nm, ff = 51%, d = 400 nm. Possibility of application of our method for analysis 2D photonic crystals is discussed also.
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Szymon Lis, Rafal Dylewicz, Jarosław Myśliwiec, Andrzej Miniewicz, and Sergiusz Patela "Quick and non-invasive method for characterisation of profiles of nano-photonics structures", Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 698917 (21 April 2008); https://doi.org/10.1117/12.785813
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