Temperature tuning of ultra-high Q/V SOI microcavities

P. Velha; C. Jocteur; E. Picard; T. Charvolin; E. Hadji; J. C. Rodier; P. Lalanne; D. Peyrade

doi:10.1117/12.781946

7 May 2008 Temperature tuning of ultra-high Q/V SOI microcavities

P. Velha, C. Jocteur, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, D. Peyrade

Proceedings Volume 6989, Photonic Crystal Materials and Devices VIII; 69891P (2008) https://doi.org/10.1117/12.781946
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Ultrahigh Q/V lineic silicon Fabry Perot (FP) microcavities relying on silica substrate have been fabricated. Two cavities designs are studied based respectively on cavity mode losses recycling and on mirrors with tapered sections. The experimental evolution of cavities characteristics are studied as a function of sample temperature. The authors achieve a quality factor of 58000 for a modal volume of 0.6 (λ/n)³.

Citation Download Citation

P. Velha, C. Jocteur, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade "Temperature tuning of ultra-high Q/V SOI microcavities", Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 69891P (7 May 2008); https://doi.org/10.1117/12.781946

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