14 May 2008 Si moulds for glass and polymer microlenses replication
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Abstract
The concept of the fabrication process of glass microlenses integrated with silicon and polymer replicas is presented. These kinds of microlenses are formed using a silicon master which is wet etched in alkaline solutions (anisotropic etching) and/or in acid solutions (isotropic etching). The control of the times and the selection of the solutions, joined with the designs of the mask for conventional photolithography and the quality of the silicon wafers are the key for obtaining the desired shapes and sizes. The fabricated moulds are used to replicate microlenses in polymer by the standard well known replication technologies and also to fabricate glass microlenses integrated on a silicon frame.
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J. Albero, J. Albero, L. Nieradko, L. Nieradko, C. Gorecki, C. Gorecki, H. Ottevaere, H. Ottevaere, V. Gomez, V. Gomez, J. Pietarinen, J. Pietarinen, "Si moulds for glass and polymer microlenses replication", Proc. SPIE 6992, Micro-Optics 2008, 69920A (14 May 2008); doi: 10.1117/12.783093; https://doi.org/10.1117/12.783093
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