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14 May 2008 A novel method for fabricating an optical grating element with a fine grating pitch
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Abstract
Optical encoders are widely used to detect the position, angle or speed in precise control systems. A rotary optical encoder mainly comprises an optical sensor and an optical grating element with a fine grating pitch. In order to improve the resolution of rotary optical encoders, the grating pitch in the optical grating element should be reduced as small as possible. That is, the pulse per revolution (ppr) in the optical grating element must be increased markedly. However, an optical grating element having over 10,000 ppr is difficult to achieve by traditional methods. In this paper, a novel method is proposed and demonstrated to replicate an optical grating element with a high ppr. Furthermore, the tiny signals generated from fine grating pitches in the optical grating element have been also measured by using a conventional optical pickup head.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kuo-Chi Chiu, Sheng-Li Chang, and Ming-Fang Hsu "A novel method for fabricating an optical grating element with a fine grating pitch", Proc. SPIE 6992, Micro-Optics 2008, 699212 (14 May 2008); https://doi.org/10.1117/12.780460
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