14 May 2008 Rapid prototyping of micro-optics on organic light emitting diodes and organic photo cells by means of two-photon 3D lithography and nano-imprint lithography
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Abstract
Provided that suitable materials are available, novel structuring methods, such as two-photon-3D-lithography (2P3DL) and nano-imprint-lithography (NIL) are promising approaches for the fabrication of organic complex 2D and 3D structures. Optical materials based on photopolymerizable resins combined with novel efficient multi-photon photoinitiators can be used for a fast and simple fabrication of μ-optical components for MOEMS. The true 3D capabilities and the high spatial resolution of the 2P3DL permit the fabrication of nearly any optical designs from CAD. With supplementary feedback controlled positioning of the laser focus, a material can be processed at an explicit target position, e.g. on an organic LED or photo cell. The position of fabricated μ-optics relative to such devices is determined by 3D sample registration prior to the structuring process. Therefore, the alignment of laser written structures to existing sample features becomes a part of the fabrication process and no further assembly is required. We demonstrate the design and the fabrication of various μ-optical structures such as waveguides and μ-lenses for photonic μ-systems by means of 2P3DL. Furthermore, μ-lens masters prototyped by means of two-photon-3D-lithography and their replication via a PDMS stamp by means of NIL are presented. In addition, it can be shown that such μ-optical systems can be fabricated in situ on organic LEDs or organic photo cells enabling powerful building blocks for μ-optical systems.
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V. Satzinger, V. Satzinger, V. Schmidt, V. Schmidt, L. Kuna, L. Kuna, C. Palfinger, C. Palfinger, R. Inführ, R. Inführ, R. Liska, R. Liska, J. R. Krenn, J. R. Krenn, } "Rapid prototyping of micro-optics on organic light emitting diodes and organic photo cells by means of two-photon 3D lithography and nano-imprint lithography", Proc. SPIE 6992, Micro-Optics 2008, 699217 (14 May 2008); doi: 10.1117/12.781129; https://doi.org/10.1117/12.781129
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