25 April 2008 Fabrication of polymer micro-optical components for integration in silicon MOEMS
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Abstract
This paper reports fabrication methods of polymer-based micro/nano optical structures based on replica molding. Various molds have been used: polymer, silicon, and SiO2-based. Different types of treatment and release agent were investigated in order to achieve an optimum demolding. Diffractive optical elements, micro-lenses and antireflective layers have been obtained in commercial or doped polymers with controlled refractive index. The quality of the replication was investigated using optical microscopy, SEM, profilometry and functional tests. The micro-optical components can be transferred onto silicon silicon chip with photodetectors, or photonic integrated circuits using microtransfer molding.
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D. Cristea, D. Cristea, P. Obreja, P. Obreja, M. Kusko, M. Kusko, M. Purica, M. Purica, A. Dinescu, A. Dinescu, A. Herrero, A. Herrero, Dan Apostol, Dan Apostol, E. Manea, E. Manea, } "Fabrication of polymer micro-optical components for integration in silicon MOEMS", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699307 (25 April 2008); doi: 10.1117/12.781067; https://doi.org/10.1117/12.781067
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