Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy

Jonas Kühn; Florian Charrière; Tristan Colomb; Frédéric Montfort; Etienne Cuche; Yves Emery; Pierre Marquet; Christian Depeursinge

doi:10.1117/12.781263

25 April 2008 Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy

Jonas Kühn, Florian Charrière, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Pierre Marquet, Christian Depeursinge

Author Affiliations +

Proceedings Volume 6995, Optical Micro- and Nanometrology in Microsystems Technology II; 699503 (2008) https://doi.org/10.1117/12.781263
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

We present dual-wavelength Digital Holographic Microscopy (DHM) measurements on a certified 8.9 nm high Chromium thin step sample and demonstrate sub-nanometer axial accuracy. We introduce a modified DHM Reference Calibrated Hologram (RCH) reconstruction algorithm taking into account amplitude contributions. By combining this with a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the axial standard deviation, reduced to at least 0.9 nm. Indeed, it is reported that averaging each of the two wavefronts recorded with real-time dual-wavelength DHM can provide up to 30% spatial noise reduction for the given configuration, thanks to their non-correlated nature.

Citation Download Citation

Jonas Kühn, Florian Charrière, Tristan Colomb, Frédéric Montfort, Etienne Cuche, Yves Emery, Pierre Marquet, and Christian Depeursinge "Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 699503 (25 April 2008); https://doi.org/10.1117/12.781263

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