1 May 2008 Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly
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Abstract
Micro-technology plays an important role in everyday life, without being much perceived. Cell phones, for instance, are daily equipped with small electronic components, which must have their quality level assured. New micro-metrology techniques were developed in the last years for such purposes. They are usually only suited for measuring specific and individual object properties (e.g. geometry, roughness, contours). A multi-sensorial approach is needed to improve the inspection range and flexibility of a micro-production cell, so that the distinct features of different industrial parts may be inspected intelligently and independently of their surface properties. This work provides a basic review on some of the most important "non-contact" micro-metrology techniques (optical and non-optical), performing a comparison of these methods among their distinct capabilities and possible industrial applications/integration scenarios. Based on the already existent sensor fusion principles, the MEOND concept will be introduced to build up flexible inspection systems for small series production by combining sensors and data, focusing possible application scenarios of the micro-world. The fusion of micro-metrology techniques has not yet been far explored and is extremely important to assure flexibility, autonomy, accuracy and robustness for the assembly of MEMS/MOEMS systems.
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R. Schmitt, R. Schmitt, A. Pavim, A. Pavim, } "Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950I (1 May 2008); doi: 10.1117/12.779952; https://doi.org/10.1117/12.779952
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