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1 May 2008 Circular grating resonators as candidates for ultra-small photonic devices
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Abstract
We investigate circular grating resonators (CGR) with a very small footprint. Photonic devices based on circular grating resonators are computationally designed, optimized and studied in their functionality using finite difference time-domain (FDTD) method. A wide variety of critical quantities such as transmission and reflection, resonant modes, resonant frequencies, and field patterns are calculated. Due to their computational size some of these calculations have to be performed on a supercomputer (e.g. parallel Blue Gene machine). The devices are fabricated in SOI using the computational design parameters. First they are defined by electron-beam lithography. Then the pattern transfer is achieved by an inductively coupled reactive-ion etch process. Finally, the devices are characterized by coupling light from a tunable laser with a tapered lensed fiber. As predicted from the simulations the measured transmission spectra exhibit a wide range of different type of resonances with quality factors exceeding 1000.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sophie Schönenberger, Nikolaj Moll, Thilo Stöferle, Thorsten Wahlbrink, Jens Bolten, Stephan Götzinger, Thomas Mollenhauer, Christian Moormann, Rainer F. Mahrt, and Bert J. Offrein "Circular grating resonators as candidates for ultra-small photonic devices", Proc. SPIE 6996, Silicon Photonics and Photonic Integrated Circuits, 69960A (1 May 2008); https://doi.org/10.1117/12.780176
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