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25 April 2008Miniaturization and evaluation of fiber optic probes for low-coherence interferometry
Low-coherence interferometry (LCI) is an established metrological technique, that has proven its capability to
measure both fast and highly accurate. To provide these advantages for the measurement inside small spaces
like bore holes or micro-tubes, the design of a miniaturized probe tip is necessary. The use of fiber optics fulfills
the requirements for the realization of flexible and small probes, which are at the same time suitable for lowcoherence
interferometry. In this work the development of miniaturized probes in all-fiber design for the use
in a LCI system is described, which consists of a modified Michelson interferometer with non-moving optical
elements. Beam shaping is achieved by the use of graded-index fibers. Thus sensor tip diameters can be reduced
down to 125μm for bare fiber design. Furthermore, validation measurements for the combination of probe head
and LCI system are presented, that prove the potential and limitations of all-fiber probes for LCI. Conclusively
an outlook for potential fields of application is given.
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Robert Schmitt, Niels König, Frank Depiereux, "Miniaturization and evaluation of fiber optic probes for low-coherence interferometry," Proc. SPIE 7003, Optical Sensors 2008, 700304 (25 April 2008); https://doi.org/10.1117/12.780535