AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range

Pawel E. Malinowski; Joachim John; Anne Lorenz; Patricia Aparicio Alonso; Marianne Germain; Joff Derluyn; Kai Cheng; Gustaaf Borghs; Robert Mertens; Jean Yves Duboz; Fabrice Semond; J.-F. Hochedez; A. BenMoussa

doi:10.1117/12.780948

26 April 2008 AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range

Pawel E. Malinowski, Joachim John, Anne Lorenz, Patricia Aparicio Alonso, Marianne Germain, Joff Derluyn, Kai Cheng, Gustaaf Borghs, Robert Mertens, Jean Yves Duboz, Fabrice Semond, J.-F. Hochedez, A. BenMoussa

Author Affiliations +

Proceedings Volume 7003, Optical Sensors 2008; 70030N (2008) https://doi.org/10.1117/12.780948
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

We report on the fabrication of Schottky-diode-based Extreme UltraViolet (EUV) photodetectors. The devices were processed on Gallium Nitride (GaN) layers epitaxially grown on 4 inch Silicon (111) substrates by Metal-Organic Chemical Vapor Deposition (MOCVD). Cutoff wavelength was determined together with the spectral responsivity measurements in the Near UltraViolet (NUV) range (200nm to 400nm). Absolute spectral responsivity measurements were performed in the EUV range (5nm to 20nm) with the synchrotron radiation using the facilities of Physikalisch- Technische Bundesanstalt (PTB), located at Berliner Elektronenspeicherring-Gesellschaft fuer Synchrotronstrahlung (BESSY). The described work is done in the framework of the Blind to Optical Light Detectors (BOLD) project supported by the European Space Agency (ESA).

Citation Download Citation

Pawel E. Malinowski, Joachim John, Anne Lorenz, Patricia Aparicio Alonso, Marianne Germain, Joff Derluyn, Kai Cheng, Gustaaf Borghs, Robert Mertens, Jean Yves Duboz, Fabrice Semond, J.-F. Hochedez, and A. BenMoussa "AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range", Proc. SPIE 7003, Optical Sensors 2008, 70030N (26 April 2008); https://doi.org/10.1117/12.780948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available