Fabrication of microfluidic networks using a high power femtosecond fiber laser

Lawrence Shah; Dong Hyuck Kam; Jyotirmoy Mazumder

doi:10.1117/12.782655

12 May 2008 Fabrication of microfluidic networks using a high power femtosecond fiber laser

Lawrence Shah, Dong Hyuck Kam, Jyotirmoy Mazumder

Proceedings Volume 7005, High-Power Laser Ablation VII; 70050E (2008) https://doi.org/10.1117/12.782655
Event: High-Power Laser Ablation 2008, 2008, Taos, New Mexico, United States

Abstract

Photolithography is well established in the fabrication of microfluidic networks; however, it is difficult to fabricate designs which require multiple depths. Furthermore, the cost/time to produce photolithographic masks is problematic, particularly when prototyping. Here we describe fabrication of microfluidic branching networks with multi-depth structures, ranging from 10s to 100s of microns, using a femtosecond fiber laser with 10 W average power, followed by chemical etching in a 10:1 solution of 49% HF and 69% HNO₃. While this technique was originally developed using a nanosecond laser, this unique femtosecond laser enables greater processing precision and faster overall processing speed.

Citation Download Citation

Lawrence Shah, Dong Hyuck Kam, and Jyotirmoy Mazumder "Fabrication of microfluidic networks using a high power femtosecond fiber laser", Proc. SPIE 7005, High-Power Laser Ablation VII, 70050E (12 May 2008); https://doi.org/10.1117/12.782655

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