Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry

V. I. Teleshevsky; S. G. Grishin

doi:10.1117/12.802270

29 April 2008 Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry

V. I. Teleshevsky, S. G. Grishin

Author Affiliations +

Proceedings Volume 7006, Lasers for Measurements and Information Transfer 2007; 70060E (2008) https://doi.org/10.1117/12.802270
Event: Lasers for Measurements and Information Transfer 2007, 2007, St. Petersburg, Russian Federation

Abstract

Methods of digital transformations of the phase measurement information in heterodyne laser interferometry with resolution below 1 nm is considered. These methods based on methods for precision time interval measurements. Application example of the methods using field programmable gate array (FPGA) is described.

Citation Download Citation

V. I. Teleshevsky and S. G. Grishin "Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry", Proc. SPIE 7006, Lasers for Measurements and Information Transfer 2007, 70060E (29 April 2008); https://doi.org/10.1117/12.802270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available