29 April 2008 Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry
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Proceedings Volume 7006, Lasers for Measurements and Information Transfer 2007; 70060E (2008) https://doi.org/10.1117/12.802270
Event: Lasers for Measurements and Information Transfer 2007, 2007, St. Petersburg, Russian Federation
Abstract
Methods of digital transformations of the phase measurement information in heterodyne laser interferometry with resolution below 1 nm is considered. These methods based on methods for precision time interval measurements. Application example of the methods using field programmable gate array (FPGA) is described.
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V. I. Teleshevsky, V. I. Teleshevsky, S. G. Grishin, S. G. Grishin, } "Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry", Proc. SPIE 7006, Lasers for Measurements and Information Transfer 2007, 70060E (29 April 2008); doi: 10.1117/12.802270; https://doi.org/10.1117/12.802270
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