29 April 2008 Laboratory researches for realizing incremental circular networks masks with laser micro-equipments
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Proceedings Volume 7007, INDLAS 2007: Industrial Laser Applications; 70070G (2008); doi: 10.1117/12.801964
Event: INDLAS 2007: Industrial Laser Applications, 2007, Bran, Romania
Abstract
The paper presents the results of researches undertaken in the domain of realizing photoelectric incremental radial masks by generating them with laser micro-equipments and special dedicated software.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gh. Ion Gheorghe, "Laboratory researches for realizing incremental circular networks masks with laser micro-equipments", Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070G (29 April 2008); doi: 10.1117/12.801964; https://doi.org/10.1117/12.801964
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KEYWORDS
Dysprosium

Corrosion

Laser applications

Fabry–Perot interferometers

Photoresist materials

Analytical research

Manufacturing

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