29 April 2008 Laser applications in the field of MEMS
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Proceedings Volume 7007, INDLAS 2007: Industrial Laser Applications; 70070K (2008) https://doi.org/10.1117/12.801970
Event: INDLAS 2007: Industrial Laser Applications, 2007, Bran, Romania
Abstract
The paper overviews some of the most important applications of lasers in the field of microsystems (MEMS). We present applications from both technology and MEMS testing. Since these applications cover a wide range, the presentation does not aim to offer a thorough, detailed presentation of each of these, but only to underline some of the most important directions and features. We present the respective applications, their working principles, their advantages and their drawbacks. In some cases we present examples of microstructures realized by using laser techniques.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gabriel M. Moagar-Poladian, Gabriel M. Moagar-Poladian, Zsolt Illyefalvi-Vitez, Zsolt Illyefalvi-Vitez, Balint Balogh, Balint Balogh, Dumitru Ulieru, Dumitru Ulieru, Antonie Coraci, Antonie Coraci, } "Laser applications in the field of MEMS", Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070K (29 April 2008); doi: 10.1117/12.801970; https://doi.org/10.1117/12.801970
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