Research of spectral description films of amorphous hydrogenated silicon received by a magnetron method with the use of an ionic source

Nicolay I. Slipchenko; Mikhail A. Bykov; Alim S. Mazinov

doi:10.1117/12.797010

22 April 2008 Research of spectral description films of amorphous hydrogenated silicon received by a magnetron method with the use of an ionic source

Nicolay I. Slipchenko, Mikhail A. Bykov, Alim S. Mazinov

Author Affiliations +

Proceedings Volume 7008, Eighth International Conference on Correlation Optics; 700811 (2008) https://doi.org/10.1117/12.797010
Event: Eighth International Conference on Correlation Optics, 2007, Chernivsti, Ukraine

Abstract

Spectral characteristics films of amorphous hydrogenated silicon received by a magnetron method with use of an ionic source are investigated. As results of researches of temperature dependences on a condition of hydrogen in argon-hydrogen plasma are resulted and a number of laws influencing on electric and optical properties amorphous films is revealed.

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Nicolay I. Slipchenko, Mikhail A. Bykov, and Alim S. Mazinov "Research of spectral description films of amorphous hydrogenated silicon received by a magnetron method with the use of an ionic source", Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 700811 (22 April 2008); https://doi.org/10.1117/12.797010

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