Recent progress with x-ray optics based on Si wafers and glass foils

R. Hudec; J. Sik; M. Lorenc; L. Pina; V. Semencova; M. Mika; A. Inneman; M. Skulinova; L. Sveda

doi:10.1117/12.790418

15 July 2008 Recent progress with x-ray optics based on Si wafers and glass foils

R. Hudec, J. Sik, M. Lorenc, L. Pina, V. Semencova, M. Mika, A. Inneman, M. Skulinova, L. Sveda

Author Affiliations +

Proceedings Volume 7011, Space Telescopes and Instrumentation 2008: Ultraviolet to Gamma Ray; 701116 (2008) https://doi.org/10.1117/12.790418
Event: SPIE Astronomical Telescopes + Instrumentation, 2008, Marseille, France

Abstract

We report on recent progress with development of astronomical X-ray optics based on thermally formed glass foils and on bent Si wafers. Experiments with thermal glass forming have continued adding wider range of evaluated and optimized parameters. Recent efforts with Si wafers have been focused on their quality improvements such as flatness and thickness uniformity in order to better meet the requirements of future X-ray astronomy projects applications, as well as on study of their surface quality, defects analysis, and methods for its reproducible measurement. The role of substrates quality in performance of final mirror arrays, as required by large future space X-ray astronomy experiments was also studied. The problem of increasing size of Si wafers, required for some X-ray optics applications, is also addressed. First results of irradiation tests of selected substrates are also reported and discussed.

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R. Hudec, R. Hudec, J. Sik, J. Sik, M. Lorenc, M. Lorenc, L. Pina, L. Pina, V. Semencova, V. Semencova, M. Mika, M. Mika, A. Inneman, A. Inneman, M. Skulinova, M. Skulinova, L. Sveda, L. Sveda, "Recent progress with x-ray optics based on Si wafers and glass foils", Proc. SPIE 7011, Space Telescopes and Instrumentation 2008: Ultraviolet to Gamma Ray, 701116 (15 July 2008); doi: 10.1117/12.790418; https://doi.org/10.1117/12.790418

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