10 July 2008 Inductive edge sensors: an innovative solution for ELT segmented mirror alignment monitoring
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The largest telescopes (ELT) involve a highly segmented primary mirror. The monitoring of the mirror shape use thousands of sensors, located on segment edges, which measure the relative piston, tip and tilt of all segments. Today, telescopes with segmented primary mirrors use capacitance-based edge sensors. Although this technology offers excellent metrological performances, its practical use is limited by the intrinsic sensitivity to humidity, dust and condensation, whose effect exceeds the requirements for future ELTs. Being specialized in both capacitive and inductive metrology, Fogale nanotech has developed a novel concept of edge sensors using the inductive technology, which does not suffer from humidity, condensation, and dust effects. Cost effective sensor with specific layout, associated electronics, demonstrated metrological performance (sub-nanometer resolution and nanometer stability) that outperforms the capacitive concept.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Didier Rozière, Didier Rozière, Bruno Luong, Bruno Luong, Bernard Fuchs, Bernard Fuchs, Ambroise Périn, Ambroise Périn, Christian Néel, Christian Néel, Samuel Lévèque, Samuel Lévèque, } "Inductive edge sensors: an innovative solution for ELT segmented mirror alignment monitoring", Proc. SPIE 7012, Ground-based and Airborne Telescopes II, 701217 (10 July 2008); doi: 10.1117/12.789444; https://doi.org/10.1117/12.789444


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