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14 July 2008 EUV-imaging experiments of a normal incident telescope with an adaptive optics system
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We are developing a normal incident EUV-telescope for a future space experiment, using an adaptive optics. The primary mirror and the secondary mirror were coated with Mo/Si multi-layers. The secondary mirror is a deformable mirror. The reference wave is produced with a 1 micro-m pin hole laser and its wave front shape is used for a correction of the EUV wave shape. The imaging experiments with optical was performed with the adaptive optics system. The imaging with 13.5nm EUV was also performed but without the adaptive optics system. The optical image is almost diffraction limited. A ray trace simulation was performed and a correction method in our system, where the EUV wave form is corrected using the optical reference lights, was investigated.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Kitamoto, T. Ogita, T. Shibata, E. Takenaka, N. Gotoh, Y. Shishido, D. Takei, M. Yoshida, M. Morii, and H. Murakami "EUV-imaging experiments of a normal incident telescope with an adaptive optics system", Proc. SPIE 7015, Adaptive Optics Systems, 70153Y (14 July 2008);

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