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25 July 2008Optical surface measurements for very large flat mirrors
Flat mirrors as large as 4 meters in diameter can be manufactured to high accuracy, limited by
the surface metrology. We present metrology systems that are specifically optimized for
measuring very large flats to high accuracy. A large aperture vibration insensitive Fizeau
interferometer combined with stitching software provides high resolution surface
measurements. Low order shape errors can be measured using scanning slope measurements
from precision inclinometers or an autocollimator with scanning pentaprism.
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J. H. Burge, P. Su, J. Yellowhair, C. Zhao, "Optical surface measurements for very large flat mirrors," Proc. SPIE 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, 701817 (25 July 2008); https://doi.org/10.1117/12.790048