25 July 2008 Micromirror array for multiobject spectroscopy in ground-based and space telescopes
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Abstract
We are developing single-crystalline silicon micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (IR MOS). The micromirrors are 100μm × 200μm in size and can be tilted by electrostatic actuation yielding a tilt-angle of 20°. Arrays of 5x5 micromirrors were gold-coated and tested at below 100K. The coated and uncoated micromirrors are optically flat (peak-to-valley deformation < λ/20 for λ > 1μm) at room temperature and in cryogenic environment. Successful actuation has been done at room temperature and at temperatures below 100K. Large arrays of 200x100 micromirrors are being fabricated and an actuation scheme for extremely large arrays has been developed.
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Severin Waldis, Severin Waldis, Frederic Zamkotsian, Frederic Zamkotsian, Patrick Lanzoni, Patrick Lanzoni, Wilfried Noell, Wilfried Noell, Nico de Rooij, Nico de Rooij, "Micromirror array for multiobject spectroscopy in ground-based and space telescopes", Proc. SPIE 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, 70182S (25 July 2008); doi: 10.1117/12.790358; https://doi.org/10.1117/12.790358
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