Paper
22 July 2008 Characterization of wafer-scale and many-output CCD detectors
Michael Lesser, Roy Tucker
Author Affiliations +
Abstract
The latest CCD detectors destined for advanced astronomical instruments are larger and have more output amplifiers than previous devices. Examples are the Semiconductor Technology Associates, Inc. 16-output STA1600 and STA1900 devices and the 8-output STA2200 Orthogonal Transfer Array CCDs. Back illuminated versions of these devices have been processed and evaluated at the University of Arizona Imaging Technology Laboratory and are the subject of this paper. Characterizing these devices has required new optical testing equipment and optimized techniques to efficiently evaluate device performance. This is especially true when even limited volume production is required. In this paper we discuss the hardware related to characterization of the large format (135 mm diagonal) and 8- and 16- output CCDs at cold temperatures, including quantum efficiency, charge transfer efficiency, noise, full well, cross-talk, and operating parameters. We also discuss related developments in dewar construction and operation, including a hybrid closed cycle and liquid nitrogen cooling system used for long-term testing, the characterization optical system, and related device packaging. We also describe the equipment for wafer level probe testing of the same devices.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Lesser and Roy Tucker "Characterization of wafer-scale and many-output CCD detectors", Proc. SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy III, 70211U (22 July 2008); https://doi.org/10.1117/12.788349
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Charge-coupled devices

Quantum efficiency

Semiconducting wafers

CCD image sensors

Liquids

Nitrogen

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