Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer

N. Chkhalo; I. Zabrodin; I. Kas'kov; E. Kluenkov; A. Pestov; N. Salashchenko

doi:10.1117/12.802350

29 April 2008 Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer

N. Chkhalo, I. Zabrodin, I. Kas'kov, E. Kluenkov, A. Pestov, N. Salashchenko

Author Affiliations +

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702504 (2008) https://doi.org/10.1117/12.802350
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

In the article a program for simulation of intensity of fluorescence of X-ray tubes (XRT) target materials excited by electrons with the energy less than 15 keV is described. The basis of the program is a modeling of interaction of fast electrons with a matter by the Monte-Carlo method. The paper has a comparison data of theoretical and experimental intensities of XRT radiation at Si Lα characteristic line and bremsstrahlung radiation of W target. Basing on the calculation a new XRT was developed.

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N. Chkhalo, N. Chkhalo, I. Zabrodin, I. Zabrodin, I. Kas'kov, I. Kas'kov, E. Kluenkov, E. Kluenkov, A. Pestov, A. Pestov, N. Salashchenko, N. Salashchenko, "Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702504 (29 April 2008); doi: 10.1117/12.802350; https://doi.org/10.1117/12.802350

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