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29 April 2008Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer
In the article a program for simulation of intensity of fluorescence of X-ray tubes (XRT) target materials excited by
electrons with the energy less than 15 keV is described. The basis of the program is a modeling of interaction of fast
electrons with a matter by the Monte-Carlo method. The paper has a comparison data of theoretical and experimental
intensities of XRT radiation at SiLα characteristic line and bremsstrahlung radiation of W target. Basing on the
calculation a new XRT was developed.
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N. Chkhalo, I. Zabrodin, I. Kas'kov, E. Kluenkov, A. Pestov, N. Salashchenko, "Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer," Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702504 (29 April 2008); https://doi.org/10.1117/12.802350