A new source of a reference spherical wave for a point diffraction interferometer

Nikolay I. Chkhalo; Alexander Yu. Klimov; Denis G. Raskin; Vladimir V. Rogov; Nikolay N. Salashchenko; Mikhail N. Toropov

doi:10.1117/12.802353

29 April 2008 A new source of a reference spherical wave for a point diffraction interferometer

Nikolay I. Chkhalo, Alexander Yu. Klimov, Denis G. Raskin, Vladimir V. Rogov, Nikolay N. Salashchenko, Mikhail N. Toropov

Author Affiliations +

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702506 (2008) https://doi.org/10.1117/12.802353
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

A new type of a spherical wave source based on a probe for a near-field microscope for a precision interferometry is reported. Experimental data of wave deformations of the light generated by the probes are given. For a numerical aperture of optics under study NA=0.22 the obtained deformations are low than λ/2000 for a red light of He-Ne laser.

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Nikolay I. Chkhalo, Alexander Yu. Klimov, Denis G. Raskin, Vladimir V. Rogov, Nikolay N. Salashchenko, and Mikhail N. Toropov "A new source of a reference spherical wave for a point diffraction interferometer", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702506 (29 April 2008); https://doi.org/10.1117/12.802353

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