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29 April 2008 A new source of a reference spherical wave for a point diffraction interferometer
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Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702506 (2008) https://doi.org/10.1117/12.802353
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation
Abstract
A new type of a spherical wave source based on a probe for a near-field microscope for a precision interferometry is reported. Experimental data of wave deformations of the light generated by the probes are given. For a numerical aperture of optics under study NA=0.22 the obtained deformations are low than λ/2000 for a red light of He-Ne laser.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nikolay I. Chkhalo, Alexander Yu. Klimov, Denis G. Raskin, Vladimir V. Rogov, Nikolay N. Salashchenko, and Mikhail N. Toropov "A new source of a reference spherical wave for a point diffraction interferometer", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702506 (29 April 2008); https://doi.org/10.1117/12.802353
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