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29 April 2008 Investigation of impurity composition of atomic hydrogen beam formed by a low-pressure arc-discharge source
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Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70250B (2008) https://doi.org/10.1117/12.802358
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation
Abstract
Results of impurity composition investigation of large-area atomic hydrogen beam formed by a low-pressure arc discharge source with self-heated cathode were cited. The study was performed on 18 metallic elements. Method, based on measurement of sheet concentration of metal atoms on Si sample surface before and after exposition in atomic hydrogen flow was used for determination of composition of impurities in atomic hydrogen beam. Measurement of sheet concentration of metal atoms was realized by ToF SIMS method. The method sensitivity was 108 at. cm-2. Principal reason of parasitic metal particles occurrence in the beam and the methods for reduction of metal impurity concentration in ΑH beam was investigated.
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V. A. Kagadei, D. I. Proskurovski, and S. V. Romanenko "Investigation of impurity composition of atomic hydrogen beam formed by a low-pressure arc-discharge source", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250B (29 April 2008); https://doi.org/10.1117/12.802358
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