Theoretical study of ionization processes in BF3 plasma

V. P. Kudrya

doi:10.1117/12.802359

29 April 2008 Theoretical study of ionization processes in BF₃ plasma

V. P. Kudrya

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70250C (2008) https://doi.org/10.1117/12.802359
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

The results of comprehensive study of electron impact ionization processes for neutral boron atoms and BF molecules are presented. In the case of atomic boron, the published ionization cross sections have been analyzed and new cross sections (including ionization from the metastable state) were calculated. The electron impact non-dissociative ionization cross section calculations for BF were carried out using a semi-empirical approach. The Franck-Condon factors involved were calculated basing on the vibrational wave functions which were obtained by solving the vibrational Schrödinger equation for those ground states. The ab initio ground state potential energy curves for BF and BF⁺ were used.

Citation Download Citation

V. P. Kudrya "Theoretical study of ionization processes in BF₃ plasma", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250C (29 April 2008); https://doi.org/10.1117/12.802359

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