Method of creation of monomolecular transistor with overhanging electrodes

I. V. Sapkov; E. S. Soldatov; V. G. Elensky

doi:10.1117/12.802415

29 April 2008 Method of creation of monomolecular transistor with overhanging electrodes

I. V. Sapkov, E. S. Soldatov, V. G. Elensky

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70250P (2008) https://doi.org/10.1117/12.802415
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

Method of creation of nanogaps between metallic (Au) thin-film electrodes using additional evaporation of metal film on relatively wide preliminary created gap is elaborated and realized. A technique of electrodes "overhanging" by dry etching of a substrate is suggested and realized. Optimal etching parameters are found as well. A technique of limitation of the region for additional metal deposition by special additional PMMA mask with narrow window along line of gaps is suggested and realized. It allows a minimization of probability of parasitic gap shunting. It is shown that elaborated method permits iterative approach to prescribed size of a gap by both decreasing of the gap width by deposition of additional metal on the walls of a wide gap and reconstruction of a gap by electromigration in the case of closing of the gap due to excessive metal deposition. Samples with gap's width less than 10 nm were obtained by such reconstruction of a gap.

Citation Download Citation

I. V. Sapkov, E. S. Soldatov, and V. G. Elensky "Method of creation of monomolecular transistor with overhanging electrodes", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250P (29 April 2008); https://doi.org/10.1117/12.802415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available