The design the new principle of electromechanical energy conversion that allows one to carry the electrome-chanical energy conversion in the nanometer gap, and significantly (up to two orders of magnitude) increase MEMS specific energy output, operation speed and power. The energy conversion takes place in the nanometer gap (5 - 200 nm), when the electric energy accumulated during reversible electrostatic pressing of the free metallic film (moving electrode) to the surface of the thin crystalline dielectric (ferroelectric film, FF) with high dielectric permeability ε (more than 3000-5000) is transformed into mechanical energy . The tension of the metallic film caused by electro-static forces in converted into the mechanical motion of the moving element of the device. With this approach, the specific energy output of 0.3 - 1 10-6 J/mm2 and driving force of 0.01-0.3 N can be achieved starting from the first microseconds of the voltage pulse. An experimental investigation of new electromechanical energy converter is per-formed.
E. G. Kostsov,
"Electromechanical energy conversion in the nanometer gaps", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251G (29 April 2008); doi: 10.1117/12.802501; https://doi.org/10.1117/12.802501