29 April 2008 Simulation, fabrication, and dynamics characteristics of electrostatically actuated switches
Author Affiliations +
Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70251H (2008); doi: 10.1117/12.802502
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation
Abstract
A MEMS capacitive-type sensor is basically an electrostatic transducer that depends on electrical energy in terms of constant voltage (voltage drive) or constant charge storage (current drive) to facilitate monitoring of capacitance change due to an external mechanical excitation, such as force, acoustical pressure or acceleration. Microfabricated cantilever beams are widely used in MEMS capacitive-type sensors as the sensing element1. One such representative of movable microdevices are the surface micromachined mechanical resonators that come in many geometrical configurations, such as laterally movable comb resonators, laterally and vertically movable beam resonators, and torsional resonators. The successful design and fabrication of these devices requires computer-aided design _CAD_ simulation tools capable of accurately simulating the electromechanical performance of MEMS devices. Accurate simulations are critical for the expeditious development of commercial products at reasonable cost. All CAD simulation tools require accurate measurements to verify models and to provide the values of the constants used in the models. In particular, in the case of micromechanical resonators, it is challenging to determine the mechanical properties of both static and dynamic behaviors of such micromechanical resonators2,3. The testing of these movable structures is usually performed using electrostatic excitation and detection by capacitive, piezoresistive, and optical methods4. This paper presents the design, fabrication and testing of capacitive aluminum resonator with various movable membrane geometries, fabricated with surface micromachining.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. V. Postnikov, Ildar I. Amirov, V. V. Naumov, V. A. Kalnov, "Simulation, fabrication, and dynamics characteristics of electrostatically actuated switches", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251H (29 April 2008); doi: 10.1117/12.802502; https://doi.org/10.1117/12.802502
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Switches

Resonators

Optical fabrication

Chemical elements

Computer aided design

Bridges

Capacitance

RELATED CONTENT

Compact and high-accuracy RF MEMS capacitive series devices
Proceedings of SPIE (January 22 2005)
Microresonant devices for power conversion
Proceedings of SPIE (September 08 1998)
Modeling of rf MEMS switches
Proceedings of SPIE (October 01 2001)

Back to Top