19 May 2008 A modified dynamical model of drying process of polymer blend solution coated on a flat substrate
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Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 702825 (2008) https://doi.org/10.1117/12.793082
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan
Abstract
We have proposed and modified a model of drying process of polymer solution coated on a flat substrate for flat polymer film fabrication. And for example numerical simulation of the model reproduces a typical thickness profile of the polymer film formed after drying. Then we have clarified dependence of distribution of polymer molecules on a flat substrate on a various parameters based on analysis of numerical simulations. Then we drove nonlinear equations of drying process from the dynamical model and the fruits were reported. The subject of above studies was limited to solution having one kind of solute though the model could essentially deal with solution having some kinds of solutes. But nowadays discussion of drying process of a solution having some kinds of solutes is needed because drying process of solution having some kinds of solutes appears in many industrial scenes. Polymer blend solution is one instance. And typical resist consists of a few kinds of polymers. Then we introduced a dynamical model of drying process of polymer blend solution coated on a flat substrate and results of numerical simulations of the dynamical model. But above model was the simplest one. In this study, we modify above dynamical model of drying process of polymer blend solution adding effects that some parameters change with time as functions of some variables to it. Then we consider essence of drying process of polymer blend solution through comparison between results of numerical simulations of the modified model and those of the former model.
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Hiroyuki Kagami, Hiroyuki Kagami, "A modified dynamical model of drying process of polymer blend solution coated on a flat substrate", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 702825 (19 May 2008); doi: 10.1117/12.793082; https://doi.org/10.1117/12.793082
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