9 September 2008 Large-area dual-scale metal transfer by adhesive force
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Abstract
We report a large-area, dual-scale metal transfer method by using a difference in adhesive force. Rigiflex polyurethane acrylate (PUA) molds with engraved nanoscale patterns were used to transfer metal layers (Au or Al) to flexible polyethylene terephthalate (PET) substrate. Transfer process was performed sequentially for the metal layers on ridge and valley regions of the mold, resulting in a dual-scale metal transfer from a single master. A simple metal wire grid polarizer was fabricated and analyzed using this method.
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Moon Kyu Kwak, Pilnam Kim, Jae Kwan Kim, Chan Ick Park, Hye Sung Cho, Kahp Y. Suh, "Large-area dual-scale metal transfer by adhesive force", Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390D (9 September 2008); doi: 10.1117/12.794421; https://doi.org/10.1117/12.794421
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