10 September 2008 Fabrication of high-aspect-ratio hard x-ray zone plates with HSQ plating molds
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Fresnel zone plates are important x-ray diffractive optics which offer a focusing resolution approaching the theoretical limit. In hard x-ray region, the refractive indices of all the materials are close to unity, which requests thick zone plate to achieve a reasonable efficiency. It makes high-resolution zone plate extremely difficult to fabricate due to its high aspect ratio. We report a LIGA-like fabrication process employing e-beam resist HSQ as the plating mold material, which is relative simply compared with traditional processes. 1-μm-thick gold zone plates with 80-nm-wide outermost zone have been fabricated with this process.
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Ming Lu, Leonidas E. Ocola, Ralu Divan, Derrick C. Mancini, "Fabrication of high-aspect-ratio hard x-ray zone plates with HSQ plating molds", Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390V (10 September 2008); doi: 10.1117/12.796839; https://doi.org/10.1117/12.796839

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