10 September 2008 Multilayer alumina and titania optical coatings prepared by atomic layer deposition
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Abstract
The microstructure and optical properties of alumina and titania multilayer coatings prepared using atomic layer deposition (ALD) has been investigated. The titania layers were prepared using TiCl4+H2O as the precursors while two different precursors, Al(CH3)3+H2O and AlCl3+H2O, were used to deposit the alumina layers. The results show that ALD can be used to produce amorphous, stoichiometric alumina and titania thin films with uniform thicknesses at low temperatures (120 °C). An antireflective coating design based on 4 alternating layers of titania and alumina was prepared and the resulting reflectance compared to theoretical calculations. The results demonstrate that ALD is a suitable technique for the deposition of optical thin films at temperatures compatible with thermally sensitive substrates.
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Nemo Biluš Abaffy, Peter Evans, Gerry Triani, Dougal McCulloch, "Multilayer alumina and titania optical coatings prepared by atomic layer deposition", Proc. SPIE 7041, Nanostructured Thin Films, 704109 (10 September 2008); doi: 10.1117/12.794618; https://doi.org/10.1117/12.794618
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