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Improved performance of an ultrastable measurement platform using a field-programmable gate array for real-time deterministic control
Self-calibration of a dual-actuated single-axis nanopositioner using measurement transitivity with extensions to calibration of two-axis systems
Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry
Measurement of oxide barrier-film thickness of Al alloy by electrochemical impedance spectroscopy at the nanometre scale
Laser diagnostics for flame synthesis of nanostructured materials: instrumentation, metrology, and process control (retraction notice)