Check of the quality of fabrication of test objects with a trapezoidal profile

P. A. Todua; V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov

doi:10.1117/12.794926

9 September 2008 Check of the quality of fabrication of test objects with a trapezoidal profile

P. A. Todua, V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov

Proceedings Volume 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II; 704209 (2008) https://doi.org/10.1117/12.794926
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

A method for objective monitoring of the quality of fabrication of test objects with a trapezoidal profile and large angles of inclination of the sidewalls is proposed. The test objects are created by anisotropic etching of silicon. The method is based on the correlation analysis of the results of experiments performed with scanning electron microscopes (SEMs) and atomic force microscopes (AFMs). In the course of such analysis, coefficients of correlation between the test points on the SEM or AFM signals are calculated. These points correspond to the coordinates of the upper and lower bases of trapezoidal protrusions of a test object structure. The closeness of the correlation coefficients to unity is indication of high quality of the created test object.

Citation Download Citation

P. A. Todua, V. P. Gavrilenko, Yu. A. Novikov, and A. V. Rakov "Check of the quality of fabrication of test objects with a trapezoidal profile", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704209 (9 September 2008); https://doi.org/10.1117/12.794926

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available