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9 September 2008 Measurement of the parameters of the electron beam of a scanning electron microscope
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Abstract
Results of investigations in the field of measurements of geometrical characteristics of the electron beam of a scanning electron microscope (SEM) are presented. Methods for determining the electron beam diameter are developed and tested on various microscopes. Besides, methods for obtaining the dependence of the electron beam diameter on the beam current, the energy of the primary electrons, and the focusing of the beam are also developed. Finally, method for determining the electron density distribution in the electron beam is proposed.
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V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Measurement of the parameters of the electron beam of a scanning electron microscope", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 70420C (9 September 2008); https://doi.org/10.1117/12.794891
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