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10 September 2008 Integrated quantum efficiency, topography, and stress metrology for solar cell manufacturing: real space approach
Wojtek J. Walecki, Fanny Szondy
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Abstract
We report a new system for measurement of the spatially resolved quantum efficiency (QE) of the semiconductor solarcells. In our method solar-cell is illuminated by modified liquid crystal display projector scanner. System allows to measure photo-current, and optical properties of the illuminated surface. The same system can be also used to measure surface topography of the wafer, its bow, and warp, and calculate lateral stress in the structure if structure cross-section is known.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wojtek J. Walecki and Fanny Szondy "Integrated quantum efficiency, topography, and stress metrology for solar cell manufacturing: real space approach", Proc. SPIE 7048, Reliability of Photovoltaic Cells, Modules, Components, and Systems, 704804 (10 September 2008); https://doi.org/10.1117/12.792934
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Cited by 3 scholarly publications.
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