Near-infrared enhanced position-sensitive avalanche photodiodes

Richard A. Myers; Richard Farrell; Frank Robertson; James E. Carey; Eric Mazur

doi:10.1117/12.794866

26 August 2008 Near-infrared enhanced position-sensitive avalanche photodiodes

Richard A. Myers, Richard Farrell, Frank Robertson, James E. Carey, Eric Mazur

Proceedings Volume 7055, Infrared Systems and Photoelectronic Technology III; 70550L (2008) https://doi.org/10.1117/12.794866
Event: Photonic Devices + Applications, 2008, San Diego, California, United States

Abstract

A laser processing method was used to microstructure the surface of position-sensitive silicon avalanche photodiodes (PSAPDs) and enhance their near-infrared response. Following laser microstructuring and high-temperature annealing, experiments were performed on PSAPDs to determine their performance at 1064 nm. As a result of this processing method, we fabricated APDs with quantum efficiencies as high as 58% at 1064 nm. The enhanced near-infrared response has now been realized in both lateral effect and quadrant-type PSAPDs without altering their electronic noise, avalanche gain or position resolution. A near-infrared-enhanced PSAPD module with temperature control and position output was assembled and tested.

Citation Download Citation

Richard A. Myers, Richard Farrell, Frank Robertson, James E. Carey, and Eric Mazur "Near-infrared enhanced position-sensitive avalanche photodiodes", Proc. SPIE 7055, Infrared Systems and Photoelectronic Technology III, 70550L (26 August 2008); https://doi.org/10.1117/12.794866

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