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2 September 2008 Metalorganic chemical vapor deposition of GaN and InGaN on ZnO substrate using Al2O3 as a transition layer
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Abstract
Al2O3 films were deposited on the Zn face of ZnO (0001) substrates as a transition layer by atomic layer deposition (ALD). The as-deposited 20 and 50nm Al2O3 films were transformed to polycrystalline α-Al2O3 phase after optimal annealing at 1100°C after 10 and 20 minutes, respectively, as identified by high resolution x-ray diffraction (HRXRD). Furthermore, GaN and InGaN layers were grown on annealed 20 and 50nm Al2O3 deposited ZnO substrates by metalorganic chemical vapor deposition (MOCVD) using NH3 as a nitrogen source at high growth temperature. Wurtzite GaN was only seen on the 20nm Al2O3/ZnO substrates. Room temperature photoluminescence (RT-PL) shows the near band-edge emission of GaN red-shifted, which might be from oxygen incorporation forming a shallow donor-related level in GaN. Raman scattering also indicated the presence of a wellcrystallized GaN layer on the 20nm Al2O3/ZnO substrate. InGaN was grown on bare ZnO as well as Al2O3 deposited ZnO substrates. HRXRD measurements revealed that the thin Al2O3 layer after annealing was an effective transition layer for the InGaN films grown epitaxially on ZnO substrates. Auger Electron Spectroscopy (AES) atomic depth profile shows a decrease in Zn in the InGaN layer. Moreover, (0002) InGaN layers were successfully grown on 20nm Al2O3/ZnO substrates after 10min annealing in a high temperature furnace.
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Nola Li, Shen-Jie Wang, Chung-Lung Huang, Zhe Chuan Feng, Adriana Valencia, Jeff Nause, Christopher Summers, and Ian Ferguson "Metalorganic chemical vapor deposition of GaN and InGaN on ZnO substrate using Al2O3 as a transition layer", Proc. SPIE 7058, Eighth International Conference on Solid State Lighting, 70580K (2 September 2008); https://doi.org/10.1117/12.797946
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