We will present recent advances in Kaleido Technology on the
ultra-precision diamond-milling process, which is an
extremely versatile tool for manufacturing of masters for wafer-based replication technologies. Diamond-milling has the
advantage of being able to manufacture lenses with much larger radii of curvatures compared to etching methods.
Spherical-, aspherical- and free-form-surfaces have been machined with form accuracies better than 200 nm (PV), arrays
up to 50 x 50 mm have been manufactured on wafers, with lens-position accuracies better than 3 μm absolute over the