17 September 2008 Diamond micro-milling for array mastering
Author Affiliations +
We will present recent advances in Kaleido Technology on the ultra-precision diamond-milling process, which is an extremely versatile tool for manufacturing of masters for wafer-based replication technologies. Diamond-milling has the advantage of being able to manufacture lenses with much larger radii of curvatures compared to etching methods. Spherical-, aspherical- and free-form-surfaces have been machined with form accuracies better than 200 nm (PV), arrays up to 50 x 50 mm have been manufactured on wafers, with lens-position accuracies better than 3 μm absolute over the entire wafer.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. C. R. Holme, N. C. R. Holme, T. W. Berg, T. W. Berg, P. G. Dinesen, P. G. Dinesen, } "Diamond micro-milling for array mastering", Proc. SPIE 7062, Laser Beam Shaping IX, 70620J (17 September 2008); doi: 10.1117/12.796480; https://doi.org/10.1117/12.796480


Free-form machining for micro-imaging systems
Proceedings of SPIE (February 06 2008)
Some Aspects Of Precision Machining Within Philips In 1984
Proceedings of SPIE (December 11 1984)
Diamond machining of flats, spherics, and aspherics
Proceedings of SPIE (October 01 1990)

Back to Top